Partial intensity approach for quantitative analysis of reflection-electron-energy-loss spectra

► Partial Intensity Approach (PIA) applied to reflection electron energy loss spectra. ► Differential inverse inelastic mean free path (DIIMFP) vs. electron energy. ► Differential surface excitation parameter (DSEP) vs. electron energy. ► DIIMFP and DSEP change in shape with electron energy. ► The electron penetration depth must exceed the surface scattering zone.