Chalcogen based treatment of InAs with [(NH4)2S/(NH4)2SO4]

► ([(NH4)2S/(NH4)2SO4] + S) treatment improved the morphology of (111)A InAs surface. ► ([(NH4)2S/(NH4)2SO4] + S) most effective at removing In2O3 and As-O. ► In2O3 removal attributed to the availability of H3O+ through a hydrolysis reaction. ► Higher solubility of As-O in S-based solution accounts for its efficient removal.