کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5425493 1395857 2006 16 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
One-dimensional dynamics of nano-scale oxidation
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
One-dimensional dynamics of nano-scale oxidation
چکیده انگلیسی

A continuum model is proposed to describe the process of scanned probe oxidation in the presence of a thin water layer on the surface of a substrate. The model describes the electric field and ion transport in both the liquid and the oxide layers and incorporates the reaction mechanism at the substrate/oxide interface. Further, the influence of the space charge due to ions trapped near the substrate/oxide interface is taken into account.Separation of time scales for the chemical reactions and ion transport as well as the asymptotic limit in terms of a small aspect ratio of the oxide layer are used to reduce the complex system of partial differential equations to a one-dimensional system of ordinary differential equations. The analytical solution of the reduced system results in the evolution equation for the oxide thickness. Numerical simulations of the evolution equation predict features of oxide growth that qualitatively agree with the experimental observations. A parametric study is conducted to determine the influence of the key operating and material parameters on the thickness of the oxide, the electric field, and ion concentration in the system.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 600, Issue 16, 15 August 2006, Pages 3297-3312
نویسندگان
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