کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5440634 | 1398234 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing](/preview/png/5440634.png)
چکیده انگلیسی
Large stable ferroelectricity in nanoscale undoped zirconia (ZrO2) thin films prepared without post-annealing has been demonstrated for the first time. Remanent polarizations up to 12 μC cmâ2 were obtained in the as-deposited ZrO2 thin films prepared by remote plasma atomic layer deposition at 300 °C substrate temperature on the Pt electrode. Ferroelectric crystallization of the films was achieved without post-annealing, which is highly beneficial to the application of the films in non-volatile memories and ultralow-power nanoelectronics. The existence of the ferroelectric orthorhombic phase with noncentrosymmetric space group Pbc21 in the as-deposited ZrO2 thin films was confirmed by high-resolution transmission electron microscopy.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of the European Ceramic Society - Volume 37, Issue 3, March 2017, Pages 1135-1139
Journal: Journal of the European Ceramic Society - Volume 37, Issue 3, March 2017, Pages 1135-1139
نویسندگان
Bo-Ting Lin, Yu-Wei Lu, Jay Shieh, Miin-Jang Chen,