کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5440641 1398235 2017 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Tantalum carbide coating via wet powder process: From slurry design to practical process tests
ترجمه فارسی عنوان
پوشش کاربید تانتالیوم با استفاده از روش پودر مرطوب: از طراحی مجدد تا آزمایشات عملی
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
چکیده انگلیسی
TaC coatings were deposited on graphite substrates via wet powder forming and sintering to potentially achieve both a highly reliable and low-cost process. Non-aqueous solvent mixtures of TaC slurries were optimized through characterization of raw materials and a novel design guide based on Hansen solubility parameters. The optimized TaC slurries enabled the formation of high-quality TaC powder compact films with ultrahigh powder packing densities of ≥70% (ca. 85% at maximum), which contributed to prevent defect formation in the TaC coatings after sintering. The TaC-coated components were tested in practical high-temperature processes, such as AlN and SiC bulk single crystal growth processes, and a SiC device fabrication process, which confirmed sufficiently low-levels of impurity incorporation and surface contamination from the TaC layers. The novel TaC-coated graphite components will contribute to higher quality and lower cost for bulk crystal growth, device fabrication, and epitaxial film growth processes of group-III nitrides and SiC.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of the European Ceramic Society - Volume 37, Issue 4, April 2017, Pages 1175-1185
نویسندگان
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