Migration behavior of alkali and alkaline-earth cations in soda-lime silicate glass surface by electrical nanoimprint

One dimensional pattern of 500 nm period was formed on a soda-lime silicate glass by the electrical nanoimprint below the glass transition temperature. The imprinted glass surface was analyzed using a transmission electron microscopy and an energy-dispersive X-ray spectroscopy with the cryogenic system. The concentrated parabolic layers of Ca2 + and Mg2 + were formed separately in the Na+ deficient layer. The deficient area both of such alkali and alkaline-earth cations was preferentially removed in an alkali etchant, resulting the enhancement of the aspect ratio of the one-dimensional relief pattern. Therefore, the distribution control of alkaline-earth cations was important for the fabrication of sub-micron scale patterns with high aspect ratio on the glass surface.