Surface finishing of ZnGeP2 single crystal by diamond tool turning method

In this work, diamond tool turning of vertical gradient freeze (VGF) grown single crystal ZnGeP2 (ZGP) was investigated. The flatness of machined ZGP surface was measured with a Zygo interferometry to be less than λ/10 and the roughness was measured with a Taloy profilermeter to be 0.7-0.9 nm. The laser-induced damage threshold was measured with a 2.07 μm wavelength pulsed laser to be >3 J/cm2.