Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure

Suppression of interfacial layer in high-K gate stack with crystalline high-K dielectric and AlN buffer layer structure

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Chemistry and Physics - Volume 184, 1 December 2016, Pages 291-297

Wei-Cheng Wang, Meng-Chen Tsai, Yi-Ping Lin, Yi-Jen Tsai, Hsin-Chih Lin, Miin-Jang Chen,