Fast deposition of conformal LiCoO2 thin film electrodes for high capacity 3D batteries

Crystallized LiCoO2 thin film electrodes are deposited on metallized silicon substrates by a combined electrochemical/hydrothermal process in a single-step. The advantages of this technique are the straightforward formation of the high temperature phase (R3¯m) without post-annealing and the achievement of high deposition rates (80 nm.min−1) compared to conventional sputtering deposition. Moreover, it is found to be a convenient route to obtain highly conformal films on 3D substrates. This opens the way for the fabrication of high-capacity microbatteries by an original template stripping method.