کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
545028 871802 2013 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Voltage and current stress induced variations in TiN/HfSixOy/TiN MIM capacitors
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Voltage and current stress induced variations in TiN/HfSixOy/TiN MIM capacitors
چکیده انگلیسی

In this paper we have investigated the long-term reliability of TiN/HfSixOy/TiN Metal–Insulator–Metal (MIM) capacitors by using constant voltage stress (CVS) and constant current stress (CCS). No significant increase in leakage current was observed as a function of stress time. On the other hand, stress induced capacitance changes were observed due to change in quadratic and liner coefficients of permittivity nonlinearities. Stress-induced oxygen vacancy related defect formation believed to be the cause of this shift in permittivity.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 53, Issue 2, February 2013, Pages 270–273
نویسندگان
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