Threshold voltage instabilities in p-channel power VDMOSFETs under pulsed NBT stress

Threshold voltage instabilities induced in p-channel power VDMOSFETs by pulsed negative bias temperature stressing are presented and compared with corresponding instabilities found after the static NBT stress. Degradation observed under the pulsed stress conditions depends on the frequency and duty cycle of stress voltage pulses, and is generally lower than the one found after the static NBT stress. Optimal frequency and duty cycle ranges for application of investigated devices are proposed as well. By selecting an appropriate combination of frequency range (1 kHz < f < 5 kHz) and duty cycle (about 25%), the pulsed stress-induced ΔVT can be reduced to a quarter of ΔVT found after the static NBT stress.