MEMS technology integrated in the CMOS back end

The Nanomech™ MEMS technology platform which implements arrays of MEMS devices embedded inside the CMOS back end is described. The key advantages of this integration approach are described in terms of achieving a reliable MEMS technology process within competitive cost requirements, without any need for dedicated process, material and packaging development. The choice of materials is also providing a strong and reliable technology for harsh environment applications where cost is also a key. Data is shown providing a broad picture of the Nanomech™ technology and its potentials for applications.