Electrical characteristics and reliability properties of metal–oxide–semiconductor capacitors with HfZrLaO gate dielectrics

Metal–oxide–semiconductor (MOS) capacitors incorporating atomic-layer-deposition (ALD) HfZrLaO high-κ gate dielectric were fabricated and investigated. The equivalent oxide thickness (EOT) is 0.68 nm and the gate leakage current density (Jg) is only 9.3 × 10−1 A/cm2. The time-dependence dielectric breakdown (TDDB) behavior agrees with the percolation model, and the TDDB characteristics are consistent with the thermochemical E-model for lifetime projection. The experimental results show that the Weibull slopes are almost independent of capacitor area and stress conditions. The field acceleration parameter (γ) and activation energy (ΔH0) are determined around 5.9–7.0 cm/MV and 0.54–0.60 eV, respectively. At 85 °C, the maximum voltage projected for 10-years TDDB lifetime is 1.87 V.