Effects of RF power on the structural, optical and electrical properties of Al-doped zinc oxide films

In this study, we discussed the effects of growth parameters on the structural and optical properties of Al-doped zinc oxide (AZO) deposited at room temperature by radio-frequency magnetron sputtering. The AZO films have been characterized in detail using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy, Hall-effect measurement system and UV–visible spectrophotometer. It was found that the morphological, structural, electrical and optical properties of AZO films are greatly dependent on sputtering power. Collision between sputter species and surface morphology play important roles in optoelectrical properties of AZO films. According to our experimental results, the AZO films can be used in versatile devices to meet various requirements.