Microsystems elements based on free-standing thick-films made with a new sacrificial layer process

A new process derived from screen-printing technology and based on thick sacrificial layers has been developed in our laboratory for the fabrication of films partially released from the substrate. The sacrificial layer acts as a stable mechanical support during the firing of the active layer and is totally removed after the final thermal treatment of the sample. Fabrication of a copper electrothermal actuator was undertaken to demonstrate the efficiency of this simple, collective and low cost process. Passive components based on this new process include the fabrication of heating resistors, strain gauges and microchannels. Moreover, the process can also be used to facilitate the implementation of piezoelectric devices.