کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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545961 | 1450559 | 2007 | 4 صفحه PDF | دانلود رایگان |

The effects of interfacial layer quality on the low-frequency noise behavior of p-channel MOSFETs with high-κ gate dielectric and metal gate are investigated. Devices with chemically grown SiO2 interfacial layers (0.8 nm) are compared with N2O (0.8 nm) interfacial oxides. A 0.4 nm SiO2 interfacial layer device is used for comparison purposes. A cross-over kind of behavior has been observed in N2O devices, which occur at lower gate voltages (∼1.2–1.3 V) when normalized spectral densities and input referred noise are investigated. This behavior is found to be closely related to the observed transconductance variation in these devices. The dominant mechanism of 1/f noise is found to be Hooge’s mobility fluctuations. Hooge’s parameter, as a figure of merit, shows an increase for 0.4 nm devices when compared to 0.8 nm devices, while 0.8 nm N2O devices confirm their cross-over nature.
Journal: Microelectronics Reliability - Volume 47, Issues 4–5, April–May 2007, Pages 501–504