کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
546086 1450563 2006 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Temperature compensation of piezoresistive micro-machined porous silicon pressure sensor by ANN
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
Temperature compensation of piezoresistive micro-machined porous silicon pressure sensor by ANN
چکیده انگلیسی

Porous silicon based micro-machined peizoresistive pressure sensors are fabricated and tested in the range of 0–1 bar and temperature range of 25–80 °C. The dependence of pressure sensitivity on the variation of ambient temperature is investigated. An intelligent online temperature compensation scheme using ANN technique has been described. The proposed scheme leads to an error reduction of approximately 98% from temperature uncompensated value. A hardware implementation of the proposed scheme using micro-controller is also described.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 46, Issues 2–4, February–April 2006, Pages 343–351
نویسندگان
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