ESD Susceptibility of Submicron Air Gaps

This work describes the investigation of the ESD susceptibility of submicron air gaps which are used e.g. in filter devices. The breakdown behaviour of the air gaps is analyzed in both the HBM (Human Body Model) time domain and the CDM (Charged Device Model) time domain. Transmission Line pulsing (TLP) reproduces the different failure signatures. Furthermore, the failure model itself is explained in detail.