کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5467144 1518610 2017 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fracture analysis of surface exfoliation on single crystal silicon irradiated by intense pulsed ion beam
ترجمه فارسی عنوان
تجزیه شکستگی لایه برداری سطحی بر روی سیلیکون تک بلوری تابش شده توسط پرتو یون پرتوی شدید
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی
Surface exfoliation was observed on single crystal silicon surface irradiated by Intense Pulsed Ion Beam (IPIB). As the strong transient thermal stress impact induced by IPIB was mainly attributed to the exfoliation, a micro scale model combined with thermal conduction and linear elastic fracture mechanics was built to analyze the thermal stress distribution along the energy deposition process. After computation with finite element method, J integral parameter was applied as the criterion for crack development. It was demonstrated that the exfoliation initiation calls for specific material, crack depth and IPIB parameter. The results are potentially valuable for beam/target selection and IPIB parameter optimization.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 413, 15 December 2017, Pages 6-12
نویسندگان
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