Installation of high-resolution ERDA in UTTAC at the University of Tsukuba: Determination of the energy resolution and the detection limit for hydrogen

A newly developed high-resolution elastic recoil detection analysis (HERDA) system installed at the 1 MV Tandetron in UTTAC at the University of Tsukuba is introduced. The effective solid angle of detector, energy resolution and detection limit for hydrogen are, for the first time, determined quantitatively by the measurements on an a-C:H (and D) film deposited on a Si substrate. In the case of a 500 keV 16O+ as the incident beam, an energy resolution of ∼0.45 keV and a detection limit of ∼3.8 × 1020 atoms/cm3 (∼0.18 at.%) with a data acquisition time of ∼310 s are derived.