Optimization of the depth resolution for deuterium depth profiling up to large depths

The depth resolution of deuterium depth profiling by the nuclear reaction D(3He,p)α is studied theoretically and experimentally. General kinematic considerations are presented which show that the depth resolution for deuterium depth profiling using the nuclear reaction D(3He,p)α is best at reaction angles of 0° and 180° at all incident energies below 9 MeV and for all depths and materials. In order to confirm this theoretical prediction the depth resolution was determined experimentally with a conventional detector at 135° and an annular detector at 175.9°. Deuterium containing thin films buried under different metal cover layers of aluminum, molybdenum and tungsten with thicknesses in the range of 0.5-11 μm served as samples. For all materials and depths an improvement of the depth resolution with the detector at 175.9° is achieved. For tungsten as cover layer a better depth resolution up to a factor of 18 was determined. Good agreement between the experimental results and the simulations for the depth resolution is demonstrated.