Crystallization and microstructural evolution of an amorphous Ni-Ti-Hf film

An amorphous Ni-Ti-Hf film was fabricated through DC magnetron sputtering deposition. The crystallization and microstructural evolution of the amorphous Ni-Ti-Hf film was observed via in situ transmission electron microscopy. Composition segregation occurred after crystallization for different grains. The grains showed two phases, namely, B19′ martensite for Ni49.78Ti35.13Hf15.09 and B2 austensite for Ni55.36Ti31.08Hf13.56 at room temperature.