کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5468124 | 1518927 | 2017 | 23 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Replacement of the TPS bending chamber with an on-site cutting method
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
To minimize the impact on the machine downtime due to replacement of a TPS bending chamber, an on-site cutting method had been developed. This method can shorten the replacement time of a bending chamber from 50 to 4 days and avoid breaking the vacuum in the frond ends and adjacent insertion devices. We also developed a plug to prevent micro dust, generated from saw-cutting of the vacuum chamber, contaminating the beam duct. Three different preconditioning methods, including baking, prebaking and no-bake treatments, were applied to the newly installed arc-cell vacuum systems to evaluate their efficacy on reducing the photon stimulated desorption (PSD) in the vacuum chambers. The PSD data show no obvious discrepancy between these preconditioning methods.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 143, September 2017, Pages 229-235
Journal: Vacuum - Volume 143, September 2017, Pages 229-235
نویسندگان
C.K. Chan, C.C. Chang, C. Shueh, I.C. Yang, L.H. Wu, C.M. Cheng, Y.T. Huang, J.Y. Chuang, Y.T. Cheng, Y.M. Hsiao, B.Y. Chen, Albert Sheng,