TiN coating effect on the elastoplastic behaviour of Ti film for electron beam exit window

The paper theoretically and experimentally studies the effect of coating on elastoplastic behaviour of the exit window membrane of an electron accelerator under loading by atmospheric pressure and heating due to partial absorption of beam energy by membrane material. The study uses finite-element analysis of benchmark problems formulated within the theory of multi-layer plates and shells to determine the profile, maximum deflection and residual (plastic) strain depending on the properties of materials, thickness of membrane and coating and radiation power. The estimates satisfactorily agree with experimental data and particularly witness that thin (about 1 μm) TiN coating significantly reduces the elastoplastic strain of the titanium membrane and electron beam energy losses in it.