کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5468172 | 1518929 | 2017 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering](/preview/png/5468172.png)
چکیده انگلیسی
Composite TiN-Ag films with various Ag content (Ag/(Ti + Ag)) were deposited using reactive magnetron sputtering and the influence of Ag content on the crystal structure, mechanical and tribological properties were investigated. The result showed that face-centered cubic (fcc) TiN and fcc-Ag co-existed in the films and TiN had a columnar-growth and the Ag nanoparticles embedded in the boundary of columnar crystal. The hardness of TiN-Ag films initially increased gradually and reached an optimum value, and then decreased with an increase in Ag content in the films. The maximum hardness value was 29 GPa at 0.8 at.% Ag. The addition of Ag into TiN film could enhance the fracture toughness (KIC) and critical load (LC1) of the films because the nanoparticle Ag provides a large volume fraction of grain boundaries. As Ag was added into TiN film, the average friction coefficient decreased from 0.78 at 0 at.% Ag to 0.20 at 41.1 at.% Ag; however, the wear rate of TiN-Ag films initially decreased and then increased, after reaching the minimum value of about 1.3 Ã 10â7 mm3/(mm.N), at 0.8 at.% Ag.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 141, July 2017, Pages 82-88
Journal: Vacuum - Volume 141, July 2017, Pages 82-88
نویسندگان
Hongbo Ju, Lihua Yu, Dian Yu, Isaac Asempah, Junhua Xu,