Fabrication and advanced electrical and stability characterization of laser-shaped thick-film and LTCC microresistors for high temperature applications

• We apply laser pattering for fabrication of thick-film microresistors.
• Very good tolerance of dimensions was achieved.
• Microresistors exhibit good electrical properties.
• Satisfactory high temperature performance of microresistors was obtained.

Thick-film and LTCC (Low Temperature Co-fired Ceramics) technologies are well-established and relatively low-cost fabrication method of passives. This paper presents systematic studies of fabrication and a wide spectrum of geometrical and electrical properties of thick-film and LTCC microresistors with dimensions down to 30 × 200 μm2. The geometrical parameters (average length, width and thickness, relations between designed and real dimensions, distribution of planar dimensions) are correlated with basic electrical properties of resistors (sheet resistance, temperature dependence of resistance), long-term stability as well as durability of microresistors to short electrical pulses in the temperature range from 25 °C to 400 °C.