کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5468265 1518933 2017 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Transport line for laser multicharged ion source
ترجمه فارسی عنوان
خط حمل و نقل برای منبع یون لیتر چندتایی
کلمات کلیدی
یون های چند بار شارژ، خط حمل و نقل، لنز آینزل،
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی
The components of a transport line for a laser multicharged ion source are described. Aluminum and carbon multicharged ions are generated by a Q-switched, nanosecond Nd:YAG laser (wavelength λ = 1064 nm, pulse width τ = 7.4 ns, and pulse energy up to 82 mJ) ablation of a target in a vacuum chamber. Time-of-flight and a three-grid retarding ion energy analyzers are used to determine the velocity and the charge state of the ions. A three-electrode cylindrical einzel lens is used to focus the ions. At a distance of 30 cm from the center of the focusing electrode of the einzel lens, Al1+ and Al2+ have a minimum beam diameter of ∼1.5 mm, while for Al3+ and Al4+ the minimum beam diameter is ∼2.5 mm. The simulation of the ion trajectories is done using SIMION 8.1. A high voltage pulse applied to a set of two parallel deflecting plates is used for the pickup of ions with different charge states according to their time-of-flight. An electrostatic cylindrical ion deflector is used for analysis and selection of charges with specific energy-to-charge ratio. The design of these transport line components and their operation are described.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 137, March 2017, Pages 14-22
نویسندگان
, , , , , ,