کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5468296 1518930 2017 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H2 and NH3 plasma treated interfacial layers
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Enhanced electrical and reliability characteristics in HfON gated Ge p-MOSFETs with H2 and NH3 plasma treated interfacial layers
چکیده انگلیسی
Electrical and reliability characteristics of Ge pMOSFETs with H2, NH3 and NH3+H2 plasma treatments were studied in this work. The GeOx interfacial layer (IL) formation and HfON dielectric deposition were performed in atomic layer deposition (ALD) chamber. H2 and NH3 plasma treatments were in-situ performed on GeOx IL in ALD chamber. The equivalent oxide thickness (EOT) can be scaled down by H2 plasma treatment, and the interface trap density (Dit) is reduced with NH3 plasma treatment. The enhanced on current of devices with H2 plasma treatment can be attributed to its lower EOT. Reliability characteristics of devices are improved by H2 plasma treatment on IL due to effects of H+ passivation at GeO2/Ge interface. A Ge pMOSFET with an EOT of ∼0.47 nm and a high hole mobility of ∼401 cm2/V-s is demonstrated in this work by combining NH3 and H2 plasma treatments (NH3+H2).
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 140, June 2017, Pages 24-29
نویسندگان
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