Surface and interface characterization of oxygen plasma activated anodic bonding of glass–ceramics to stainless steel

The anodic bonding of RAS glass–ceramics to stainless steel were carried out at 350–400 °C and 800–1000 V under atmosphere, the micro-topography and compositions of the bonding interfaces also were investigated. With the assistant of oxygen plasma activated, anodic bonding was achieved at 350 °C and 800 V for 23 min under atmosphere, and the anodic bonding strength was up to 1.23 MPa. Experiments results pointed out oxygen plasma could help forming the bonding with glass–ceramics to stainless steel, and the width of cation depletion layer about 50 μm, lithium iron oxide (LiFe5O8 and Li5FeO4) were observed on the surface of glass–ceramics after anodic bonding.

► Oxygen plasma activated could help the formation of the anodic bonding process.
► The bonding of glass-ceramics to stainless steel were achieved at 350 C and 800V for the first time.
► The width of cation depletion layer about 50μm and the bonding strength was up to 1.23Mpa.