Dynamic laser stimulation techniques for advanced failure analysis and design debug applications

Dynamic laser stimulation (DLS) techniques have been introduced over the past few years to tackle the localization of dynamic failures. This article first reviews the principles behind DLS techniques and their implementation based on monitoring functional test mapping (pass/fail) signals and monitoring other electrical variations. The integration of DLS within a dynamic optical analysis workflow in failure analysis and design debug is then presented. Finally improvements aimed at increasing the ability of DLS techniques to solve ever-growing range of subtle soft defects issues are discussed.