کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5488882 1399588 2017 22 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fluid simulation of a pulse-modulated, inductively coupled plasma discharge with radio frequency bias
ترجمه فارسی عنوان
شبیه سازی سیال یک پالس مدولاسیون، تخریب پلاسما همراه با القایی با تعویض فرکانس رادیویی
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک ماده چگال
چکیده انگلیسی
The plasma characteristics of pulse-modulated, radio frequency (RF) power in an inductively coupled plasma discharge were investigated. A two-dimensional axisymmetric structure was simulated based on the fluid model. In addition, the energy and mobility of neutral species were considered. When the power was switched to ON from OFF, the electron density and electron temperature changed instantaneously. When the power was OFF, we analyzed the profiles of the electron density and electron temperature over time. Moreover, the ion energy distribution function was investigated using several RF bias conditions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 17, Issue 3, March 2017, Pages 403-408
نویسندگان
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