Investigation of ultrathin Pt/ZrO2-Al2O3-ZrO2/TiN DRAM capacitors Schottky barrier height by internal photoemission spectroscopy

Investigation of ultrathin Pt/ZrO2-Al2O3-ZrO2/TiN DRAM capacitors Schottky barrier height by internal photoemission spectroscopy

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Current Applied Physics - Volume 17, Issue 2, February 2017, Pages 267-271

Sang Yeon Lee, Jaewan Chang, Jaehyung Choi, Younsoo Kim, HanJin Lim, Hyeongtag Jeon, Hyungtak Seo,