Dynamic simulation of octahedron slotted metal structures

• Robust metallizations are needed for high current applications.
• To achieve a higher current capability slotted metal tracks are used.
• The new design concept is to use octahedron slotted metal tracks.

Robust metallizations for harsh environment and high current applications in integrated circuits are required for automotive or industrial applications. To achieve a higher current capability so called “power metals” are used. The new concept of slotted geometries shows a better robustness towards degradation due to electromigration. This is a new design concept which is contrary to the conventional concept to use homogeneous filled metal tracks. A reliability investigation of octahedron-shaped slots in metal tracks was carried out by dynamic simulations. The determination thermal–electrical–mechanical behaviour was simulated with the finite element software ANSYS®.