The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems

A new experimental device has been designed and produced with the purpose of investigating the possible effect of nano-scale interaction forces on the reliability issue related to pull-in of uncharged plates. This paper reports the outcomes of the experimental tests carried out on the aforementioned micro-structure, which presents the essential features of real-life MEMS and is produced using the same technology as standard commercial devices. The experiments show, with a high degree of repeatability, a premature failure of the structure, as a consequence of pull-in instability. The results of the tests are critically evaluated by comparison with theoretical predictions, in order to assess the role played by nano-scale interaction forces caused by, e.g., parasitic charging, contact and patch potentials, Casimir force.

► New MEMS for experimental characterization of nano-scale interaction forces.
► Standard, industrial, micro-machining process.
► Experimental results with high repeatability show premature pull-in.
► Critical evaluation of experimental results versus theoretical predictions.
► Role of Casimir force and other interaction forces on premature pull-in phenomena.