Numerical prototyping methods in microsystem accelerometers design

The authors of this research would like to present the numerical prototyping methods in reference to design of microsystem silicon accelerometer. As an example device the capacitive accelerometer was taken into account. The accelerometer was prepared as a FEM parametric model. The model was then processed by the numerical optimization algorithms in order to find the optimal design parameters. For this purpose, the so-called numerical multi-objective optimization process was carried out. The idea was to find the optimal solution in reference to more than one optimizing criterion. As a result the set of optimal solutions was obtained and this method seems to be promising for similar purposes.