Characterization of electron temperature by simulating a multicusp ion source

The electron trajectories were calculated using CST Particle Studio to optimize the plasma. The array configuration of the permanent magnets decides the magnetic field inside the ion source. The extraction bias voltage and the structure of the multicusp ion source body decide the electric field. Optimization of the electromagnetic field was performed with these factors. CST Particle Studio was used to calculate the electron temperature with a varying permanent magnet array. Four types of permanent magnet array were simulated to optimize the electron temperature. It was found that a 2-layer full line cusp field (with inverse field) produced the best electron temperature control behavior.