Three-dimensional structuration of zero-shrinkage LTCC ceramics for microfluidic applications

In this paper, a simple and repeatable method for realization of microfluidic channels in zero-shrinkage LTCC Green TapeTM system (Heraeus® HL2000, Germany) is presented. This method is basing on two-step lamination process and use of sacrificial volume material (SVM). Three different fugitive materials are taken into account: high purity carbon paste, carbon tape (Thick Film Technologies, USA) and cetyl alcohol. The methods of analysis such as TGA (thermo-gravimetric analysis) and SEM (scanning electron microscope) are used to characterize this new fabrication process of microfluidic channels in zero-shrinkage LTCC ceramics.