کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5497255 | 1530940 | 2016 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Electron Beam Stability in the Energy Recovery Linac for the Lithographic free Electron Laser
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک و نجوم (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Electron Beam Stability in the Energy Recovery Linac for the Lithographic free Electron Laser Electron Beam Stability in the Energy Recovery Linac for the Lithographic free Electron Laser](/preview/png/5497255.png)
چکیده انگلیسی
According to microelectronic production leaders the lithography based on the free electron laser (FEL) could become the main technology for the elements mass production with scale to 5Â nm in the nearest future. One of the main problem is the absence of the working FEL with required parameters. The feasibility study of those FEL based on superconducting energy-recovery linac (ERL) was made in Budker INP. The ERL average current is limited by longitudinal and transverse instabilities, caused by interaction between electron beam and its induced fields in the superconducting cavities. The estimations of the threshold currents and ERL parameters were made.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physics Procedia - Volume 84, 2016, Pages 96-100
Journal: Physics Procedia - Volume 84, 2016, Pages 96-100
نویسندگان
Ya.V. Getmanov, N.A. Vinokurov, O.A. Shevchenko, I.V. Davidyuk,