Effect of support materials upon platinum catalyst prepared on the wall surface of silicon microchannel

Effect of oxide support prepared over the wall surface of silicon microchannel on the activity and selectivity of platinum catalyst was studied by the dehydrogenation of cyclohexane. Baking of the silicon chip affected the catalytic activity by changing the thickness of surface silica layer. Several kind of oxide layer was prepared over the optimum silica layer at the silicon microchannel wall. Alumina layer prepared by sol-gel method using distilled water for the hydrolysis (sol-gel-aqueous method) gave optimum performance of platinum catalyst. Mist decomposition method can provide efficient platinum catalyst, however, the activity was not as stable as the ordinary impregnation method.