Simulation of Low Power Heater for Gas Sensing Application

This paper presents design, simulation and analysis of a platinum (Pt) based micro-heater for gas sensing applications. Finite element method (FEM) analysis is employed for the purpose of performing the tasks mentioned above thereby investigates the various properties of the high resistive material platinum (Pt) using COMSOL Multiphysics. The Micro-heater is principally designed to ensure minimum power consumption, low thermal mass and better temperature uniformity. Furthermore, the effect of variation of thickness of heating element with created temperature and power consumption of the MEMS micro-heater is observed and evaluated.