کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
610327 880646 2010 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Breath figure lithography: A facile and versatile method for micropatterning
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی شیمی کلوئیدی و سطحی
پیش نمایش صفحه اول مقاله
Breath figure lithography: A facile and versatile method for micropatterning
چکیده انگلیسی

We describe a facile method to micropattern solid substrates: breath figure lithography (BFL). A honeycomb structured gold mask was prepared by sputter-coating a micro-porous polymer film with BF arrays, and then inductively coupled plasma reactive ion etching (ICP–RIE) transferred the patterns onto silicon wafer. The large etching rate selectivity between golden mask and substrate plays an important role in the effective transfer of the patterns. The versatility of the method was demonstrated by forming micropatterns on various solid substrates with adjustable sizes. Furthermore, the micropatterns on solid substrate could be replicated by PDMS stamp.

Photograph of sunlight diffraction obtained from a micropatterned silicon wafer by BFL.Figure optionsDownload high-quality image (44 K)Download as PowerPoint slide

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Colloid and Interface Science - Volume 342, Issue 1, 1 February 2010, Pages 192–197
نویسندگان
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