کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
619893 | 881864 | 2006 | 14 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
In situ wear studies of surface micromachined interfaces subject to controlled loading
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
شیمی کلوئیدی و سطحی
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چکیده انگلیسی
Friction and wear are major limiting factors for the development and commercial implementation of devices fabricated by surface micromachining techniques. These tribological properties are studied using a polycrystalline silicon nanotractor device, which provides abundant, quantitative information about friction and wear at an actual microelectromechanical system (MEMS) interface. This in situ approach to measuring tribological properties of MEMS, combined with high-resolution atomic force microscope (AFM) images of wear tracks, provides insight into the effects of different MEMS surface processing on wear. In particular, monolayer coatings have a significant positive effect, while surface texturing does not strongly affect performance.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Wear - Volume 260, Issue 6, 10 March 2006, Pages 580–593
Journal: Wear - Volume 260, Issue 6, 10 March 2006, Pages 580–593
نویسندگان
Erin E. Flater, Alex D. Corwin, Maarten P. de Boer, Robert W. Carpick,