Excimer laser deinsulation of Parylene-C on iridium for use in an activated iridium oxide film-coated Utah electrode array

► The iridium film exhibits a much higher resistance to damage due to high laser power. ► The lower the laser fluence, the higher the humps of carbon debris. ► An electrode array tip laser ablated using a high fluence shows a distinctive boundary line between the exposure area and Parylene. ► Laser deinsulation of electrode tips with iridium film and subsequent activation of the iridium film are suitable for fabrication of high-performance silicon-based implantable devices.