کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6753396 1430811 2018 13 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Impact of excitation waveform on the frequency stability of electrostatically-actuated micro-electromechanical oscillators
ترجمه فارسی عنوان
تأثیر شکل موج تحریک بر پایداری فرکانس نوسانگرهای میکرو الکترومکانیکی برقی الکترواستاتیکی
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی عمران و سازه
چکیده انگلیسی
In this paper, the frequency stability of high-Q electrostatically-actuated MEMS oscillators with cubic restoring forces, and its relation with the amplitude, the phase and the shape of the excitation waveform, is studied. The influence on close-to-the carrier frequency noise of additive processes (such as thermomechanical noise) or parametric processes (bias voltage fluctuations, feedback phase fluctuations, feedback level fluctuations) is taken into account. It is shown that the optimal operating conditions of electrostatically-actuated MEMS oscillators are highly waveform-dependent, a factor that is largely overlooked in the existing literature. This simulation-based study covers the cases of harmonic and pulsed excitation of a parallel-plate capacitive MEMS resonator.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Sound and Vibration - Volume 422, 26 May 2018, Pages 79-91
نویسندگان
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