Effects of 1064 nm laser on MOS capacitor

► We would like to predict complex circuit's behavior under photoelectric stimulation. ► For that, it is mandatory to understand first the behavior of elementary devices. ► That is why we analyze effects induced by static laser stimulation on MOS capacitors. ► Traps are induced in different part of the band gap depending on the substrate type. ► It is also shown that electric stress increases the density of such interface traps.