Real-time failure imaging system under power stress for power semiconductors using Scanning Acoustic Tomography (SAT)

► We proposed a real-time failure imaging system for power devices under power stress. ► Scanning Acoustic Tomography (SAT/SAM) is a main apparatus for this system. ► The proposed technique was applied to an actual real-time failure analysis. ► Die detachment and damage at bonding wire were observed by a movie image.