The combinational or selective usage of the laser SQUID microscope, the non-bias laser terahertz emission microscope, and fault simulations in non-electrical-contact fault localization

► In LSI chip failure analysis, fault isolation is one of the most important steps. ► We have developed L-SQ and NB-LTEM, as no electrical contact fault isolation tools. ► Laser SQUID microscope (L-SQ), no bias laser terahertz emission microscope (NB-LTEM). ► Combo use of L-SQ, NB-LTEM, and their simulators is useful in LSI fault isolation. ► Many cases of fault isolation using these tools have been demonstrated.