Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS

► TDS was used to study outgassing from thin films used for MEMS vacuum package. ► We studied the outgassing of polycrystalline SiGe, SiC and SiO2 films. ► Primary desorption products were found to be H2, H2O and CO2. ► The CO2 could be correlated with CF4 plasma interface cleaning used for SiGe PECVD.