کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
700463 890866 2006 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A contact detection algorithm of the z-axis of a wire bonder
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی هوافضا
پیش نمایش صفحه اول مقاله
A contact detection algorithm of the z-axis of a wire bonder
چکیده انگلیسی

A new design of contact detection algorithm is proposed for the z-axis of a wire bonder that interconnects between pads and leads in semiconductor manufacturing processes. The proposed test parameter for contact detection is statistically designed using the relation between Kalman filter propagations, and it has a simple process for defining probability of false alarm. Fast and stable contact detection of the z  -axis is extremely important for maintaining proper quality in the fine pitch gold wire bonding process, which has a small pad size of below 70μm. Experimental results are presented to demonstrate the advantages of the proposed algorithm.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Control Engineering Practice - Volume 14, Issue 9, September 2006, Pages 1035–1043
نویسندگان
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