Cryogenic abrasive jet machining of polydimethylsiloxane at different temperatures

► A new cryogenic abrasive jet machining apparatus was developed which enabled temperature control. ► At temperatures of −82 and −127 °C, erosion was enhanced compared to room temperature results. ► Particle embedding decreased volumetric erosion at −82 °C. ► Volumetric erosion increased by a factor of more than 10 when then jet temperature was below −127 °C. ► The most efficient machining of PDMS occurred at −178 °C, at angles of attack between 30° and 60°.